Abstract: With the development of micro electro mechanical systems (MEMS) technology, MEMS motion modulation imaging systems have shown great potential in high-resolution imaging due to their miniaturization and high precision. To effectively utilize low resolution image sets with sub-pixel information collected by MEMS motion modulation microsystems, this article proposes a super-resolution image reconstruction algorithm based on MEMS motion modulation imaging microsystems. Firstly, the imaging principle of MEMS motion modulation imaging system and its impact on image resolution is analyzed. Then, the super-resolution image reconstruction algorithm is introduced. The simulation experiments are conducted at the end of the article. The experimental results show that this method performs better than the comparative methods in improving image reconstruction quality and restoring image details, and can effectively perform super-resolution image reconstruction tasks. The peak signal-to-noise ratio is increased by 2 dB, and the structural similarity is 0.93. The research content of this article can effectively adapt to MEMS motion modulation imaging microsystems. This method does not require a dataset for training and complex computing power support, which is beneficial for subsequent hardware deployment.