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    基于薄膜吸气剂的半球谐振陀螺真空封装技术研究

    Research on Vacuum Packaging of Hemispherical Resonator Gyroscopes Based on Thin-Film Getters

    • 摘要: 针对传统热子吸气剂在半球谐振陀螺(Hemispherical Resonator Gyroscope, HRG)真空封装中存在的空间占用大、工艺流程复杂、潜在微泄漏风险及成本高等问题,提出了一种基于薄膜吸气剂的一体化真空封装方案。该方案设计并构建了一种多工位一体化真空批量封装平台,实现了薄膜吸气剂的激活与外壳封接在单一真空腔体内同步完成。该平台采用双温区控制系统,分别满足薄膜吸气剂激活(≥350 ℃)与外壳钎焊(≥180 ℃)的工艺要求,并集成了机械虹膜夹持与真空步进电机等自动化机构,实现了外壳与钎焊区的精准、无损拾取与落位。实验结果表明,该封装方案可实现腔体真空度优于10-4 Pa,漏率低于1×10-11 Pa·m3/s,为HRG的小型化、高可靠性及低成本批量制造提供了有效的技术路径。

       

      Abstract: To address the issues of large space occupation, complex process flow, potential micro-leakage risks, and high costs associated with traditional hot getters in the vacuum packaging of hemispherical resonator gyroscopes (HRGs), an integrated vacuum packaging solution based on thin-film getters is proposed in this paper. A multi-station integrated vacuum batch packaging platform is designed and constructed, enabling the simultaneous activation of the thin-film getter and the shell sealing within a single vacuum chamber. The platform employs a dual-zone temperature control system to meet the process requirements for thin-film getter activation (≥350 ℃) and shell brazing (≥180 ℃), respectively. It integrates automated mechanisms such as mechanical iris clamps and vacuum stepper motors, achieving precise and non-destructive pickup and placement of the shell and brazing zone. Experimental results demonstrate that this packaging solution can achieve a cavity vacuum level better than 10-4 Pa and a leakage rate below 1×10-11 Pa·m3/s, providing an effective technical pathway for the miniaturization, high reliability, and low-cost batch manufacturing of HRGs.

       

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