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    适用于轮胎镜与平面光栅组合光谱仪的像差补偿方法

    Aberration Compensation Method for a Toroidal Mirror-Plane Grating Spectrometer

    • 摘要: 设计了一种用于高次谐波源的光谱仪。该光谱仪使用一个离面安装的平面光栅来分离所有谐波,分离的衍射光束被一块轮胎镜聚焦于探测器平面,系统理论总效率超过60%。对轮胎镜-平面光栅复合系统的像差来源和补偿方法进行了分析,光栅衍射引入的像差可以通过优化轮胎镜的定向角度来补偿,在21.1~49.3 nm的极紫外光谱范围,实现了平均光谱分辨率λ/△λ从27到100的提升,中心波长处分辨率可达236。通过换用更高刻线密度的光栅,此类光谱仪设计方案也可用于X射线的光谱分离与探测。

       

      Abstract: A spectrometer for high-harmonicsources is designed. The spectrometer uses an off-plane mounted plane grating to separate all harmonics. The separated diffracted beam is focused on the detector plane by a toroidal mirror.The total theoretical efficiency of the system exceeds 60%. The source of aberration and the compensation methods are analyzed for the toroidal mirror-plane grating composite system. The aberration introduced by grating diffraction can be compensated by optimizing the orientation angle of the tire mirror. In the extreme ultraviolet spectral range of 21.1~49.3 nm, the average spectral resolution λ/△λ is improved from 27 to 100, and the resolution at the central wavelength could reach 236. The spectrograph design can also be used for X-ray spectral separation and detection by switching to grating with higher groove density.

       

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