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    高响应性能的Au/Al2O3/Au异质结紫外光电探测器

    Ultraviolet Photodetector Based on High-Responsivity Au/Al2O3/Au Heterojunction

    • 摘要: 随着光电器件需求的不断增长,市场对低成本、高性能, 尤其是在低光照或黑暗环境下仍能稳定运行的图像传感器提出了更高要求。设计了一种基于Au/Al2O3/Au结构的紫外光电探测器,运用微纳加工工艺制备器件并系统研究了其光电性能。实验结果表明,该器件在222~310 nm波段内表现出良好的光响应特性,光电流对光功率呈明显依赖关系,光开关比最高可达1.3×104。在222 nm波长下,器件实现了2.4 A/W的高响应度和1.1×1011 Jones的比探测率。这些结果验证了氧化铝作为介质层在光电探测器应用中的优异性能,为新型紫外探测器的设计与制备提供了可行路径。此外,基于该器件构建的紫外成像系统实现了高分辨率图像获取,展现出卓越的成像能力,能够精准映射数字图案。为紫外光电探测器在高速、宽光谱响应与成像应用领域提供了有力支持,有广阔的应用前景。

       

      Abstract: With the increasing demand for optoelectronic devices, the market has placed higher requirements on image sensors which are low-cost, high-performance, and capable of stable operation under low-light or dark conditions. Anultraviolet photodetector based on an Au/Al2O3/Au architecture is designed in this paper. The device is fabricated via micro/nanofabrication processes, and its optoelectronic characteristics are comprehensively evaluated. Experimental results demonstrate that the device exhibits excellent photoresponse characteristics in the 222~310 nm wavelength range, with the photocurrent showing a clear dependence on incident light power. The device achieves a maximum on/off ratio of 1.3 × 104. At a wavelength of 222 nm, it deliveres a high responsivity of 2.4 A/W, a specific detectivity of 1.1 × 1011 Jones. These results confirm the excellent performance of Al2O3 as a dielectric layer in photodetector applications and provide a feasible pathway for the design and fabrication of next-generation ultraviolet detectors. Moreover, a UV imaging system based on this device successfully achieves high-resolution image acquisition, demonstrating outstanding imaging capabilities and enabling precise mapping of digital patterns. This study strongly supports the application of ultraviolet photodetectors in high-speed, broadband response, and imaging fields.

       

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