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    基于相位测量偏折术的透明物体表面形貌测量

    Transparent Object Shape Measurement Based on Deflectometry

    • 摘要: 相位测量偏折术可实现对镜面、类镜面物体的面形高精度测量,而对于透射率高,且曲率较大的透明物体,若基于反射原理通常只能完成一部分面形测量,同时还要剔除后表面的寄生反射影响。针对曲率大的透明物体,结合相位测量偏折术(PMD)的测量原理以及立体视觉提出了法线一致性约束以及折射视差两种方法完成三维面形测量。测量系统包括两个相机和一个显示正弦条纹的显示器,首先完成双目系统标定,得到内外参数,再放置待测透明物体,通过相移技术可获取由待测物体引起的偏折光线位置,若光线仅偏折一次且物体折射率已知,根据双目视觉原理和法线一致性约束即可计算出物体表面形貌。计算机模拟中,恢复了焦距为242.857 1 mm的平凸透镜的上表面面形,重建误差分布在±5 μm。仿真结果证明了所提方法的可行性;通过对实物的初步测量进一步验证了所提方法的可行性,本方法特别适用于曲率大的透明物体表面三维形貌测量。

       

      Abstract: The phase measurement deflection technique can measure the surface shape of mirror and specular objects with high accuracy,but for transparent objects with high transmittance and large curvature,only part of the surface shape can be measured based on the principle of reflection.At the same time,the effect of parasitic reflection on the rear surface should be eliminated.For a transparent object with large curvature,two methods,normal consistency constraint and refraction parallax,are proposed based on the measurement principle of(PMD)and stereo vision to complete the 3D surface measurement.The measurement system consists of two cameras and a monitor which displays sinusoidal grating.First,the stereo system is calibrated,and the internal and external parameters are obtained.Then,a tested transparent object is placed between the display and the cameras,and the position of the deflected light caused by the tested object can be obtained by the phase-shifting technique.If the light rays deflect only once and the refractive index of the object is known,the 3-D shape of the object can be calculated according to the principle of stereo vision and the normal consistency.In the computer simulation,the upper surface shape of the plano-convex lens with focal length of 242.857 1 mm is restored,and the reconstruction error is distributed in ±5 μm.Computer simulation confirms these feasibility.The feasibility of the proposed method is further verified by the preliminary measurement of the object.This method is especially suitable for the measurement of 3-D shape of transparent objects with large curvature.

       

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