Research on Vacuum Packaging of Hemispherical Resonator Gyroscopes Based on Thin-Film Getters

To address the issues of large space occupation, complex process flow, potential micro-leakage risks, and high costs associated with traditional hot getters in the vacuum packaging of hemispherical resonator gyroscopes (HRGs), an integrated vacuum packaging solution based on thin-film getters is proposed in this paper. A multi-station integrated vacuum batch packaging platform is designed and constructed, enabling the simultaneous activation of the thin-film getter and the shell sealing within a single vacuum chamber. The platform employs a dual-zone temperature control system to meet the process requirements for thin-film getter activation (≥350 ℃) and shell brazing (≥180 ℃), respectively. It integrates automated mechanisms such as mechanical iris clamps and vacuum stepper motors, achieving precise and non-destructive pickup and placement of the shell and brazing zone. Experimental results demonstrate that this packaging solution can achieve a cavity vacuum level better than 10^-4 Pa and a leakage rate below 1×10^-11 Pa·m³/s, providing an effective technical pathway for the miniaturization, high reliability, and low-cost batch manufacturing of HRGs.